In this paper, the new lapping slurry and sharpening slurry are released. And also the deliquescence degree of CLBO is fallen to cheapest. A completely new Operating technological innovation is additionally adopted. Immediately after tough sprucing, the focus of extremely-precision sharpening slurry is enhanced adequately. So does the extremely-precision sharpening velocity, along with the wiping pace is faster in comparison to the deliquescence pace. The CLBO crystal surface area roughness can accomplish 1nm and preserve the surface quality perfectly. Entry through your establishment
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We summarized The existing advancement standing of your large-electric power DUV laser each with the wavelength of FHG of your 1-μm laser and at 193 nm. The new development from the stable-point out/fiber laser, plus the nonlinear optical crystals, prompts not simply the standard ability but also the beam quality (coherence) from the DUV lasers to an unparalleled stage.
As an example, The existing concave OC could be replaced by a aircraft mirror which could mitigate the facility density within the area of M1 and also the diamond. Also, employing superior injury threshold coatings for M1 and diamond would also Enhance the output power with none damages. Then, the NIR laser in the 2nd Stokes wavelength may very well be superior sufficient, and also its very good beam excellent, to deliver the ultimate DUV laser at 193 nm which has a high typical energy.
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LBO is also a superb nonlinear crystal which is usually applied to the SHG in the NIR for the eco-friendly. The DUV laser is normally realized by two stages of SFG from the LBO crystals considering the fact that there is no section-matching angle for LBO to convert the green laser at 515 nm or 532 nm towards the DUV straight by SHG [16]. A short while ago, the NSBBF crystal has also demonstrated its possible to acquire a substantial conversion efficiency from 532 nm to 266 nm. The stroll-off angle and deff with the NSBBF are Virtually similar to People of CLBO [seventeen].
On one other aspect, the power scaling with the NIR laser is another part to boost the normal electrical power of your 193-nm DUV laser. As a result of not enough the superior-electrical power amplification Option of the NIR laser (one example is at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) could be applied to create a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength along with acquiring relative increased electric power [21]. A short while ago, a diamond Raman laser confirmed its potential in obtaining a significant electric power and a high conversion performance within the 1st Stokes of the one-μm laser [22,23], which suggests the possibility to generally be utilized within the 193-nm DUV laser technology because of its superior Raman get and enormous frequency change.
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The heart beat duration of the next Stokes light was shortened to 5 ns as revealed in Figure 7a, an individual-shot photograph in the oscilloscope, and that is a standard phenomenon in Raman laser [44] even though the heart beat period from the pump laser was 10 ns.
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The beam profile demonstrated in Determine 7b shown a very good beam quality as among the merits of Raman laser, which might be valuable to crank out a 193-nm DUV laser with a top quality beam.
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The event with the 193-nm laser was demonstrated by levels of SFG. So that you can scale the DUV laser ability correctly, a fresh thought on the 193-nm CLBO Crystal DUV laser generation is offered based on the diamond Raman laser.